Tsann-Bim Chiou
3Patents
2h-index
7Co-inventors
33Inventor score
Filing activity: Sep 21, 2011 → Nov 30, 2016
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8945800B2 | Method of preparing a pattern, method of forming a mask set, device manufacturing method and computer program | Physics | 3 | Active |
| US10416566B2 | Optimization of source and bandwidth for new and existing patterning devices | Physics | 3 | Active |
| US9563135B2 | Process tuning with polarization | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.