Tsuyoshi Hida
7Patents
2h-index
10Co-inventors
48Inventor score
Filing activity: Jul 8, 1999 → Jul 7, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US9076636B2 | Plasma processing apparatus, plasma processing method and storage medium for storing program for executing the method | Electricity | 25 | Active |
| US6199582A | Flow control valve | Emerging Cross-Sectional Technologies | 19 | Expired |
| US10020172B2 | Plasma processing apparatus, plasma processing method and storage medium for storing program for executing the method | Electricity | 0 | Active |
| US8776356B2 | Electrostatic chuck and manufacturing method thereof | Emerging Cross-Sectional Technologies | 0 | Active |
| US8517392B2 | Electrostatic chuck and manufacturing method thereof | Emerging Cross-Sectional Technologies | 0 | Active |
| US11942357B2 | Workpiece placement apparatus and processing apparatus | Electricity | 0 | Active |
| US11410871B2 | Workpiece placement apparatus and processing apparatus | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.