Tsuyoshi Narabe
7Patents
6h-index
17Co-inventors
49Inventor score
Filing activity: Aug 16, 1995 → Oct 15, 1997
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5625436A | Scanning type exposure apparatus and exposure method | Physics | 43 | Expired |
| US5617211A | Exposure apparatus | Physics | 38 | Expired |
| US5850279A | Alignment method, projection exposure method, and projection exposure apparatus | Physics | 25 | Expired |
| US5777722A | Scanning exposure apparatus and method | Physics | 22 | Expired |
| US5760881A | Exposure apparatus with light shielding portion for plotosensitive elements | Physics | 21 | Expired |
| US5798822A | Exposure apparatus | Physics | 12 | Expired |
| US5978094A | Alignment device and method based on imaging characteristics of the image pickup system | Physics | 5 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.