Alignment device and method based on imaging characteristics of the image pickup system
US5978094A · kind A · utility
5Cited by
1References
30Claims
0Family size
Assignee
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Key dates
| Filing date | Sep 30, 1997 |
| Grant date | Nov 2, 1999 |
| Priority date | — |
| Expiry date | Sep 30, 2017 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F9/70
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An alignment device includes an image pickup optical system for picking up an image of a first reference mark disposed on a mask and an image of a second reference mark disposed on a photosensitive substrate through an image pickup optical system, a memory for storing information associated with the imaging characteristics of the image pickup optical system, and a correction system for correcting the positions of the first and second reference marks, detected using image information from the image pickup system, on the basis of the information associated with the imaging characteristics of the image pickup optical system.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.