Inventor · Solms, DE

Uwe Graf

6Patents
4h-index
12Co-inventors
46Inventor score

Filing activity: Apr 12, 2000 → May 23, 2005

Most-cited inventions

PatentTitleAreaCited byStatus
US7271889B2 Device and method for inspecting an object Physics 19 Expired
US6879440B2 Autofocus module and method for a microscope-based system Physics 15 Expired
US8154718B2 Apparatus and method for inspecting micro-structured devices on a semiconductor substrate Physics 12 Expired
US6696679B1 Method for focusing of disk-shaped objects with patterned surfaces during imaging Physics 6 Expired
US6713746B2 Arrangement and method for illuminating a specimen field in an optical instrument Physics 2 Expired
US7002740B2 Setting module for the illumination of an optical instrument Physics 0 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.