Autofocus module and method for a microscope-based system

US6879440B2 · kind B2 · utility

Assignee

• Leica Microsystems Semiconductor GmbH · DE

Inventors

• Franz Cemic · Hachenburg, DE
• Lambert Danner · Wetzlar, DE
• Robert Mainberger · Bonbaden, DE
• Michael Veith · Sankt Ingbert, DE
• Martin Osterfeld · Bietigheim-Bissingen, DE
• Uwe Graf · Solms, DE

Key dates

• Filing date: Jan 31, 2003
• Grant date: Apr 12, 2005
• Expiry date: Apr 30, 2023

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B21/247
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

An autofocus module for a microscope-based system includes at least two light sources, each of which generates a light beam for focusing. An optical directing device is provided that directs a respective portion of each light beam onto an incoupling means, which couples each of the light beams into the illuminating light beam of the microscope-based system and directs the light beams onto a specimen. A first and a second detector receive the light beams of the first and second light source reflected from the surface of the specimen, and ascertain the intensities on the first and second detector in time-multiplexed fashion.