Uwe Griesinger
5Patents
3h-index
13Co-inventors
43Inventor score
Filing activity: Oct 29, 1999 → May 14, 2003
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6660437B2 | Alternating phase mask | Physics | 8 | Expired |
| US6466373B1 | Trimming mask with semitransparent phase-shifting regions | Physics | 5 | Expired |
| US6838216B2 | Photolithographic mask and methods for producing a structure and of exposing a wafer in a projection apparatus | Physics | 3 | Expired |
| US6635388B1 | Contact hole fabrication with the aid of mutually crossing sudden phase shift edges of a single phase shift mask | Physics | 2 | Expired |
| US6835506B2 | Method for producing a photomask and corresponding photomask | Physics | 0 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.