Uwe Hamm
3Patents
2h-index
5Co-inventors
27Inventor score
Filing activity: Sep 13, 2001 → Feb 22, 2002
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6781685B2 | Process and device for in-situ decontamination of a EUV lithography device | Physics | 8 | Expired |
| US6824277B2 | Optical beam guidance system and method for preventing contamination of optical components contained therein | Emerging Cross-Sectional Technologies | 4 | Expired |
| US6559060B2 | Process for the structuring of a substrate | Electricity | 1 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.