Uwe Liebold
2Patents
1h-index
6Co-inventors
27Inventor score
Filing activity: Feb 7, 2003 → Dec 23, 2003
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7130762B2 | Method and system for handling substrates in a production line including a cluster tool and a metrology tool | Emerging Cross-Sectional Technologies | 10 | Expired |
| US7962459B2 | Method of providing context specific recipes in a semiconductor facility by defining product categories | Emerging Cross-Sectional Technologies | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.