Patent · US Active

Method of providing context specific recipes in a semiconductor facility by defining product categories

US7962459B2 · kind B2 · utility

0Cited by

3References

20Claims

0Family size

Assignee

GlobalFoundries Inc. · KY

Inventors

Kay Hellig · Austin, US
Ronald Grünz · Dresden, DE
Heiko Wagner · Dresden, DE
Uwe Liebold · Grafing, DE

Key dates

Filing date	Dec 23, 2003
Grant date	Jun 14, 2011
Priority date	—
Expiry date	Oct 11, 2029

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY02P90/02
WIPO fieldControl
WIPO sectorInstruments

Abstract

The RMS database for a semiconductor process line is established on the basis of product groups or categories, wherein all members of a category are linked by a common feature, such as a common basic design or a common basic technology. Common process recipes in a specified category may then be set up only once, thereby reducing the amount of effort for establishing the database. Moreover, new product types may be readily incorporated into the categories, thereby enabling the employment of the already-established category-specific context information.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.