Method and system for handling substrates in a production line including a cluster tool and a metrology tool

US7130762B2 · kind B2 · utility

Assignee

• Advanced Micro Devices, Inc. · US

Inventors

• Kay Hellig · Austin, US
• Peter Goerigk · Dresden, DE
• Uwe Liebold · Grafing, DE
• Ronald Gruenz · Dresden, DE
• Karl-Heinz Fandrey · Dresden, DE

Key dates

• Filing date: Feb 7, 2003
• Grant date: Oct 31, 2006
• Expiry date: Nov 25, 2024

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y02P90/02
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

In a production line, a cluster tool having a plurality of substantially identical process modules and a metrology tool includes a control unit that allows one to receive, store and process information that indicates in which process module which substrates have been processed and which selects, on the basis of the process information, which substrate has to be subjected to a measurement. Advantageously, the substrates are selected so that each process module is represented by a corresponding substrate to be measured in order to reliably monitor the process quality of each process module.