Vien Quach
2Patents
2h-index
3Co-inventors
30Inventor score
Filing activity: Feb 15, 2002 → Apr 19, 2004
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6732017B2 | System and method for point of use delivery, control and mixing chemical and slurry for CMP/cleaning system | Physics | 7 | Expired |
| US7054719B2 | System and method for point of use delivery, control and mixing chemical and slurry for CMP/cleaning system | Physics | 7 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.