System and method for point of use delivery, control and mixing chemical and slurry for CMP/cleaning system
US7054719B2 · kind B2 · utility
7Cited by
3References
24Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 19, 2004 |
| Grant date | May 30, 2006 |
| Priority date | — |
| Expiry date | Jul 5, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05D11/132
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
A method of mixing two or more chemicals such as for a CMP system. The method includes delivering a first chemical to a first inlet port of a point of use mixer at a first flow rate, delivering a second chemical to a second inlet port of the point of use mixer at a second flow rate, controlling the flow of the first and second chemicals into the mixer upon demand for a mixture of the first and second chemicals and balancing the flow of the first and second chemicals into the mixer. The mixture can also be output such as to a CMP process. A system for mixing two or more chemicals is also described.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.