Vincent S. Calia
8Patents
5h-index
6Co-inventors
56Inventor score
Filing activity: Mar 6, 1975 → Jan 12, 2001
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6133577A | Method and apparatus for producing extreme ultra-violet light for use in photolithography | Electricity | 18 | Expired |
| US3962694A | Method and apparatus for monitoring an electrically actuated tool | Electricity | 11 | Expired |
| US6065203A | Method of manufacturing very small diameter deep passages | Emerging Cross-Sectional Technologies | 7 | Expired |
| US6105885A | Fluid nozzle system and method in an emitted energy system for photolithography | Physics | 5 | Expired |
| US6190835A | System and method for providing a lithographic light source for a semiconductor manufacturing process | Mechanical Engineering; Lighting; Heating | 5 | Expired |
| US4933546A | Orifice ring ion beam neutralizer | Electricity | 4 | Expired |
| US6552350B2 | System and method for providing a lithographic light source for a semiconductor manufacturing process | Mechanical Engineering; Lighting; Heating | 3 | Expired |
| US6437349B1 | Fluid nozzle system and method in an emitted energy system for photolithography | Physics | 1 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.