Wayne J. Dunstan
10Patents
4h-index
17Co-inventors
53Inventor score
Filing activity: Sep 29, 2004 → Nov 29, 2016
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8598552B1 | System and method to optimize extreme ultraviolet light generation | Electricity | 14 | Active |
| US7741639B2 | Multi-chambered excimer or molecular fluorine gas discharge laser fluorine injection control | Electricity | 11 | Active |
| US7835414B2 | Laser gas injection system | Electricity | 8 | Active |
| US8098698B2 | Active spectral control of DUV laser light source | Electricity | 4 | Active |
| US8872122B2 | Method of timing laser beam pulses to regulate extreme ultraviolet light dosing | Electricity | 4 | Active |
| US7852889B2 | Active spectral control of DUV light source | Electricity | 3 | Active |
| US7830942B2 | Ultraviolet laser light source pulse energy control system | Electricity | 2 | Active |
| US9588430B2 | System and method to adaptively pre-compensate for target material push-out to optimize extreme ultraviolet light production | Electricity | 1 | Active |
| US9755396B1 | EUV LPP source with improved dose control by combining pulse modulation and pulse control mode | Electricity | 1 | Active |
| US9238243B2 | System and method to adaptively pre-compensate for target material push-out to optimize extreme ultraviolet light production | Electricity | 1 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.