Active spectral control of DUV light source
US7852889B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 25, 2006 |
| Grant date | Dec 14, 2010 |
| Priority date | — |
| Expiry date | Jan 17, 2027 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S3/136
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
According to aspects of an embodiment of the disclosed subject matter, a line narrowed high average power high pulse repetition laser micro-photolithography light source bandwidth control method and apparatus are disclosed which may comprise a bandwidth metrology module measuring the bandwidth of a laser output flight pulse beam pulse produced by the light source and providing a bandwidth measurement; a bandwidth error signal generator receiving the bandwidth measurement and a bandwidth setpoint and providing a bandwidth error signal; an active bandwidth controller providing a fine bandwidth correction actuator signal and a coarse bandwidth correction actuator signal responsive to the bandwidth error. The fine bandwidth correction actuator and the coarse bandwidth correction actuator each may induce a respective modification of the light source behavior that reduces bandwidth error. The coarse and fine bandwidth correction actuators each may comprise a plurality of bandwidth correction actuators.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.