William A. Eckes
8Patents
5h-index
18Co-inventors
60Inventor score
Filing activity: Jan 5, 1982 → Oct 22, 2007
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US4412133A | Electrostatic cassette | Electricity | 337 | Expired |
| US4788431A | Specimen distance measuring system | Electricity | 12 | Expired |
| US5209402A | Laminar flow gas diffuser | Chemistry; Metallurgy | 8 | Expired |
| US7336369B2 | Multi-axis interferometer system using independent, single axis interferometers | Physics | 7 | Expired |
| US7345287B2 | Cooling module for charged particle beam column elements | Electricity | 6 | Active |
| US6219146A | Laser reflector alignment | Physics | 4 | Expired |
| US7470919B2 | Substrate support assembly with thermal isolating plate | Physics | 1 | Active |
| US7518732B2 | Multi-axis interferometer system using independent, single axis interferometers | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.