William R. Bartlett
7Patents
6h-index
8Co-inventors
48Inventor score
Filing activity: May 1, 1995 → Sep 26, 2000
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5775983A | Apparatus and method for conditioning a chemical mechanical polishing pad | Performing Operations; Transporting | 58 | Expired |
| US5899801A | Method and apparatus for removing a substrate from a polishing pad in a chemical mechanical polishing system | Performing Operations; Transporting | 43 | Expired |
| US5951373A | Circumferentially oscillating carousel apparatus for sequentially processing substrates for polishing and cleaning | Performing Operations; Transporting | 41 | Expired |
| US6136715A | Circumferentially oscillating carousel apparatus for sequentially polishing substrates | Performing Operations; Transporting | 22 | Expired |
| US6506099B1 | Driving a carrier head in a wafer polishing system | Performing Operations; Transporting | 11 | Expired |
| US6350188B1 | Drive system for a carrier head support structure | Electricity | 6 | Expired |
| US6245680A | Circumferentially oscillating carousel apparatus for sequentially processing substrates for polishing and cleaning | Performing Operations; Transporting | 1 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.