Patent · US Expired

Drive system for a carrier head support structure

US6350188B1 · kind B1 · utility

6Cited by

6References

19Claims

0Family size

Assignee

Applied Materials, Inc. · US

Inventors

William R. Bartlett · Los Gatos, US
Arulkumar Shanmugasundram · Sunnyvale, US
Jim Tobin · Fremont, US

Key dates

Filing date	Mar 10, 2000
Grant date	Feb 26, 2002
Priority date	—
Expiry date	Mar 10, 2020

Classification

Technology area (CPC H)Electricity
CPC primaryH01L21/67092
WIPO fieldMachine tools
WIPO sectorMechanical engineering

Abstract

A chemical mechanical polishing apparatus has a polishing station, a transfer station, a carrier head to support a substrate, a rotatable carousel supporting the carrier head, a carousel drive shaft coupled to the carousel to rotate the carousel, and a carousel drive system. The carousel is rotatable between a first position in which the carrier head is in the polishing station and a second position in which the carrier head is in the transfer station. The carousel drive system includes a drive motor, a gear reduction box coupled to an output of the drive motor, and a brake system coupling the gear reduction box to the drive shaft.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.