Winsor Lam
5Patents
3h-index
12Co-inventors
46Inventor score
Filing activity: Oct 27, 2006 → Oct 7, 2011
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7767064B2 | Position controlled dual magnetron | Electricity | 7 | Active |
| US7618893B2 | Methods of forming a layer for barrier applications in an interconnect structure | Electricity | 5 | Active |
| US8476162B2 | Methods of forming layers on substrates | Electricity | 3 | Active |
| US7829456B2 | Method to modulate coverage of barrier and seed layer using titanium nitride | Electricity | 1 | Active |
| US8168543B2 | Methods of forming a layer for barrier applications in an interconnect structure | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.