Inventor · Hwaseong-si, KR

Woo-Mok Son

2Patents
1h-index
6Co-inventors
30Inventor score

Filing activity: May 30, 2019 → Dec 8, 2021

Most-cited inventions

PatentTitleAreaCited byStatus
US11222786B2 Method of manufacture including polishing pad monitoring method and polishing apparatus including polishing pad monitoring device Performing Operations; Transporting 1 Active
US11735427B2 Polishing apparatus including polishing pad conditioner, non-contact displacement sensor, and data processor Performing Operations; Transporting 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.