Woo-Mok Son
2Patents
1h-index
6Co-inventors
30Inventor score
Filing activity: May 30, 2019 → Dec 8, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US11222786B2 | Method of manufacture including polishing pad monitoring method and polishing apparatus including polishing pad monitoring device | Performing Operations; Transporting | 1 | Active |
| US11735427B2 | Polishing apparatus including polishing pad conditioner, non-contact displacement sensor, and data processor | Performing Operations; Transporting | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.