Yohei Eto
5Patents
2h-index
12Co-inventors
40Inventor score
Filing activity: Mar 7, 2016 → Apr 8, 2020
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US10589398B2 | Heat exchanger for regulating surface temperature of a polishing pad, polishing apparatus, polishing method, and medium storing computer program | Mechanical Engineering; Lighting; Heating | 5 | Active |
| US10475691B2 | Substrate transfer hand | Performing Operations; Transporting | 2 | Active |
| US10414018B2 | Apparatus and method for regulating surface temperature of polishing pad | Performing Operations; Transporting | 2 | Active |
| US11380559B2 | Carrier device, work processing apparatus, control method of carrier device and storage medium storing program | Electricity | 1 | Active |
| US11094548B2 | Apparatus for cleaning substrate and substrate cleaning method | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.