Yongxiang He
9Patents
5h-index
14Co-inventors
56Inventor score
Filing activity: Dec 21, 2001 → Nov 7, 2018
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6902628B2 | Method of cleaning a coated process chamber component | Emerging Cross-Sectional Technologies | 20 | Expired |
| US6899798B2 | Reusable ceramic-comprising component which includes a scrificial surface layer | Performing Operations; Transporting | 12 | Expired |
| US6944006B2 | Guard for electrostatic chuck | Electricity | 11 | Expired |
| US9385001B1 | Self-aligned ITO gate electrode for GaN HEMT device | Electricity | 8 | Active |
| US6656535B2 | Method of fabricating a coated process chamber component | Chemistry; Metallurgy | 5 | Expired |
| US7185760B2 | Non-contact protective packaging for surface-sensitive articles | Performing Operations; Transporting | 4 | Expired |
| US12191636B2 | Vertical cavity surface emitting laser (VCSEL) array and manufacturing method | Electricity | 0 | Active |
| US12132297B2 | Vertical cavity surface emitting laser (VCSEL) array and manufacturing method | Electricity | 0 | Active |
| US12068585B2 | System and method for preventing thermal induced failures in vertical cavity surface emitting laser (VCSEL) array | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.