Method of cleaning a coated process chamber component
US6902628B2 · kind B2 · utility
20Cited by
28References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 25, 2002 |
| Grant date | Jun 7, 2005 |
| Priority date | — |
| Expiry date | Jan 4, 2023 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S134/902
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
In a method of cleaning and refurbishing a process chamber component having a metal coating having a surface thereon, the surface of the metal coating is immersed in an acidic solution to remove at least a portion of the process deposits from the surface. Thereafter, the surface of the metal coating is immersed in a basic solution to remove substantially all the metal coating. The component may optionally be bead blasting to roughen a surface of the component, and the metal coating may be re-formed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.