Young-Jee Yoon
5Patents
2h-index
11Co-inventors
44Inventor score
Filing activity: Aug 8, 2006 → Dec 18, 2015
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7747063B2 | Method and apparatus for inspecting a substrate | Electricity | 2 | Active |
| US7697130B2 | Apparatus and method for inspecting a surface of a wafer | Physics | 2 | Active |
| US7498248B2 | Methods of compensating for an alignment error during fabrication of structures on semiconductor substrates | Physics | 0 | Active |
| US9892983B2 | Apparatus for forming a thin layer and method of forming a thin layer on a substrate using the same | Electricity | 0 | Active |
| US7626164B2 | Method of scanning a substrate, and method and apparatus for analyzing crystal characteristics | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.