Yücel Kök
3Patents
2h-index
15Co-inventors
34Inventor score
Filing activity: Jun 16, 2006 → Jun 11, 2010
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7751027B2 | Lithographic apparatus and device manufacturing method | Physics | 13 | Active |
| US8451423B2 | Lithographic apparatus and method | Physics | 7 | Active |
| US9268236B2 | Lithographic apparatus and device manufacturing method having heat pipe with fluid to cool substrate and/or substrate holder | Physics | 2 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.