Yukio Tojo
8Patents
3h-index
13Co-inventors
54Inventor score
Filing activity: Aug 25, 1992 → Mar 14, 2013
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7727296B2 | Collecting unit for semiconductor process | Emerging Cross-Sectional Technologies | 11 | Active |
| US5315402A | Video signal recording/reproducing system for increasing recording density of a frequency modulated signal | Electricity | 9 | Expired |
| US6925731B2 | Thin film forming apparatus cleaning method | Chemistry; Metallurgy | 3 | Expired |
| US8664013B2 | Continuous processing system, continuous processing method, and program | Electricity | 3 | Active |
| US8222162B2 | Batch processing method for forming structure including amorphous carbon film | Electricity | 2 | Active |
| US8592324B2 | Method for forming laminated structure including amorphous carbon film | Electricity | 1 | Active |
| US6635310B1 | Method of heat treatment | Electricity | 0 | Expired |
| US8652973B2 | Processing method for forming structure including amorphous carbon film | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.