Yulin PENG
3Patents
1h-index
6Co-inventors
30Inventor score
Filing activity: May 24, 2016 → Jun 14, 2018
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US10985045B2 | Electrostatic chuck mechanism and semiconductor processing device having the same | Electricity | 1 | Active |
| US9899194B2 | Apparatus for plasma treatment and method of operating the apparatus | Electricity | 0 | Active |
| US10170285B2 | Method of operating semiconductor manufacturing apparatus and semiconductor devices | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.