Yuri Shirman
2Patents
1h-index
9Co-inventors
37Inventor score
Filing activity: Oct 23, 2007 → Jul 18, 2019
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7912657B2 | Method and system for providing a compensated auger spectrum | Physics | 2 | Active |
| US11366398B2 | Time-domain optical metrology and inspection of semiconductor devices | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.