Patent · US Active

Method and system for providing a compensated auger spectrum

US7912657B2 · kind B2 · utility

2Cited by

5References

19Claims

0Family size

Assignee

Applied Materials Israel Ltd. · IL

Inventors

Dror Shemesh · Hod HaSharon, IL
Yuri Shirman · Rehovot, IL

Key dates

Filing date	Oct 23, 2007
Grant date	Mar 22, 2011
Priority date	—
Expiry date	May 15, 2028

Classification

Technology area (CPC G)Physics
CPC primaryG01N23/2276
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A system for providing a compensated Auger spectrum, the system includes: a processor, adapted to generate a compensated Auger spectrum in response to a non-compensated Auger spectrum and in response to an electric potential related parameter, and an interface to an electron detector that is adapted to detect electrons emitted from the first area, wherein the interface is connected to the processor, and wherein the electric potential related parameter reflects a state of a first area of an object that was illuminated by a charged particle beam during the generation of the non-compensated Auger spectrum.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.