Time-domain optical metrology and inspection of semiconductor devices
US11366398B2 · kind B2 · utility
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16Claims
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Key dates
| Filing date | Jul 18, 2019 |
| Grant date | Jun 21, 2022 |
| Priority date | — |
| Expiry date | Jul 18, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B2210/56
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Semiconductor device metrology including creating a time-domain representation of wavelength-domain measurement data of light reflected by a patterned structure of a semiconductor device, selecting an earlier-in-time portion of the time-domain representation that excludes a later-in-time portion of the time-domain representation, and determining one or more measurements of one or more parameters of interest of the patterned structure by performing model-based processing using the earlier-in-time portion of the time-domain representation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.