Yuta Takeda
6Patents
1h-index
13Co-inventors
44Inventor score
Filing activity: Jun 22, 2010 → Jul 12, 2019
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US10156012B2 | Cleaning method, method of manufacturing semiconductor device, substrate processing apparatus, and a non-transitory computer-readable recording medium | Chemistry; Metallurgy | 2 | Active |
| US10926211B2 | Method for purifying fluorine compound gas | Emerging Cross-Sectional Technologies | 1 | Active |
| US10754944B2 | Processing system, and processing method and program | Physics | 0 | Active |
| US8213274B2 | Optical disc reproducing method | Physics | 0 | Active |
| US8562751B2 | Dry cleaning method of substrate processing apparatus | Chemistry; Metallurgy | 0 | Active |
| US12145857B2 | Method for producing tungsten hexafluoride | Chemistry; Metallurgy | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.