Inventor · Haifa, IL

Yuval Lamhot

5Patents
1h-index
20Co-inventors
43Inventor score

Filing activity: Apr 5, 2018 → Jan 25, 2023

Most-cited inventions

PatentTitleAreaCited byStatus
US10699969B2 Quick adjustment of metrology measurement parameters according to process variation Electricity 1 Active
US11454894B2 Systems and methods for scatterometric single-wavelength measurement of misregistration and amelioration thereof Electricity 0 Active
US11158548B2 Overlay measurement using multiple wavelengths Physics 0 Active
US11862522B2 Accuracy improvements in optical metrology Electricity 0 Active
US11861824B1 Reference image grouping in overlay metrology Physics 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.