Graphite susceptor

US10000847B2 · kind B2 · utility

Assignee

• Applied Materials, Inc. · US

Inventors

• Preetham Rao · Bengaluru, IN
• Subramani Iyer · San Jose, US
• Kartik Shah · Saratoga, US
• Mehran Behdjat · San Jose, US

Key dates

• Filing date: Sep 23, 2015
• Grant date: Jun 19, 2018
• Expiry date: Aug 18, 2036

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/68785
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

Embodiments described herein include a susceptor for semiconductor processing including an oriented graphite plate that may have a thickness of at least 1 mm. The susceptor may have a support member, and the oriented graphite plate may be disposed on the support member. The support member may have a center thermal conduit and an edge thermal conduit, and may be substantially solid between the center thermal conduit and the edge thermal conduit.