Mehran Behdjat
38Patents
7h-index
59Co-inventors
72Inventor score
Filing activity: Jul 13, 2002 → Jan 19, 2024
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| USD793526S1 | Showerhead for a semiconductor processing chamber | General | 284 | Active |
| US8222574B2 | Temperature measurement and control of wafer support in thermal processing chamber | Electricity | 46 | Active |
| US7860379B2 | Temperature measurement and control of wafer support in thermal processing chamber | Electricity | 20 | Active |
| US7972441B2 | Thermal oxidation of silicon using ozone | Electricity | 15 | Expired |
| USD807481S1 | Patterned heater pedestal | General | 13 | Active |
| US8056500B2 | Thermal reactor with improved gas flow distribution | Electricity | 12 | Active |
| US8608853B2 | Thermal reactor with improved gas flow distribution | Electricity | 7 | Active |
| US8796589B2 | Processing system with the dual end-effector handling | Emerging Cross-Sectional Technologies | 7 | Active |
| US8409353B2 | Water cooled gas injector | Electricity | 6 | Active |
| US8198567B2 | High temperature vacuum chuck assembly | Emerging Cross-Sectional Technologies | 6 | Active |
| US9330955B2 | Support ring with masked edge | Electricity | 5 | Active |
| US8888916B2 | Thermal reactor with improved gas flow distribution | Electricity | 4 | Active |
| US8256754B2 | Lift pin for substrate processing | Electricity | 4 | Active |
| US9659809B2 | Support cylinder for thermal processing chamber | Electricity | 3 | Active |
| US8070408B2 | Load lock chamber for large area substrate processing system | Electricity | 3 | Active |
| US10128144B2 | Support cylinder for thermal processing chamber | Electricity | 2 | Active |
| US9579750B2 | Particle control in laser processing systems | Performing Operations; Transporting | 2 | Active |
| US9842759B2 | Support ring with masked edge | Electricity | 1 | Active |
| US8567756B2 | Slit valve door able to compensate for chamber deflection | Mechanical Engineering; Lighting; Heating | 1 | Active |
| US8698048B2 | High temperature vacuum chuck assembly | Emerging Cross-Sectional Technologies | 1 | Active |
| US10741428B2 | Semiconductor processing chamber | Electricity | 1 | Active |
| US8896837B1 | Test apparatus for reflective cavity characterization | Physics | 1 | Active |
| US10056286B2 | Support ring with masked edge | Electricity | 1 | Active |
| US8528762B2 | Electron beam welding of large vacuum chamber body having a high emissivity coating | Electricity | 1 | Active |
| US10000847B2 | Graphite susceptor | Electricity | 1 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.