Surface inspecting method
US10001444B2 · kind B2 · utility
2Cited by
32References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 1, 2015 |
| Grant date | Jun 19, 2018 |
| Priority date | — |
| Expiry date | Aug 17, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/8848
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A surface inspecting method includes: irradiating an incident light beam of a first polarized state on a target object, the incident light beam comprising parallel light and having a cross-sectional area: measuring a second polarized state of a reflected light beam reflected from the target object; and performing inspection on an entire area of the target object on which the incident light beam is irradiated, based on a variation between the first polarized state and the second polarized state.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.