Scanning electron microscope and method for controlling same
US10014160B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 20, 2015 |
| Grant date | Jul 3, 2018 |
| Priority date | — |
| Expiry date | Apr 20, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2806
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The scanning electron microscope includes: an electron source; a first deflector for deflecting a primary electron beam emitted from the electron source; a second deflector for focusing the primary electron beam deflected by the first deflector and deflecting a second electron from a sample, which is generated the focused primary electron beam, to the outside of the optical axis; a voltage applying unit for applying a negative voltage to the sample to decelerate the primary electron beam; a spectrometer for dispersing the secondary electron; a detector for detecting the secondary electron passing through the spectrometer; an electrostatic lens provided between the second deflector and the spectrometer; and a voltage control unit that controls the voltage applied to the electrostatic lens based on the negative voltage applied to the sample. The electrostatic lens allows the deflecting action to be overlapped with the converging action.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.