Micro heater and micro sensor and manufacturing methods thereof
US10015841B2 · kind B2 · utility
3Cited by
6References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 24, 2015 |
| Grant date | Jul 3, 2018 |
| Priority date | — |
| Expiry date | Apr 21, 2036 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05B2203/017
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A micro heater and a micro sensor is capable of providing a heater having a small thermal capacity by forming an air gap which surrounds the heater wire, and forming the heater wire on a porous substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.