Method and apparatus for self verification of pressure-based mass flow controllers
US10031005B2 · kind B2 · utility
16Cited by
15References
14Claims
0Family size
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Key dates
| Filing date | Sep 25, 2012 |
| Grant date | Jul 24, 2018 |
| Priority date | — |
| Expiry date | Feb 12, 2034 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/7761
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A mass flow control system can be self verified for its accuracy when controlling a flow to a process. The system comprises: a control valve for controlling the flow of fluid through the system as a function of a control signal; a controller for generating the control signal as a function of measured flow of fluid through the system and a targeted flow set point; a pressure sensor for measuring the controlling fluid pressure for use in measuring and verifying the flow rate; and a source of fluid for providing a known volume of fluid for use in verifying the system accuracy anytime between steps of the flow control process.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.