System for and method of multiple channel fast pulse gas delivery
US10031531B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | May 5, 2014 |
| Grant date | Jul 24, 2018 |
| Priority date | — |
| Expiry date | Mar 27, 2036 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/86445
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
A system and method are configured to deliver pulses of desired mass of gases. The system delivers a plurality of sequences of pulses of a desired mass of gas through at least two flow channels. The system comprises: a multi-channel fast pulse gas delivery system including (a) a plurality of flow channels, each channel comprising a flow sensor and a control valve, and (b) a dedicated controller configured and arranged to receive a recipe of one or more sequences of steps for opening and closing at least some of the control valves so as to deliver as a sequence of pulses of at least one gas through each of the corresponding channels as a function of the recipe. The method comprises: receiving at a dedicated controller from a host computer the prescribed recipe of one or more sequences of steps of pulses of one or more gases to be delivered through the plurality of flow channels; and using the sequence of steps to control each flow channel including a flow sensor and a control valve by opening and closing the control valve of each flow channel in accordance with the sequence of steps of the recipe.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.