Generating simulated output for a specimen
US10043261B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 9, 2017 |
| Grant date | Aug 7, 2018 |
| Priority date | — |
| Expiry date | Feb 13, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T2207/30148
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
Methods and systems for generating simulated output for a specimen are provided. One method includes acquiring information for a specimen with one or more computer systems. The information includes at least one of an actual optical image of the specimen, an actual electron beam image of the specimen, and design data for the specimen. The method also includes inputting the information for the specimen into a learning based model. The learning based model is included in one or more components executed by the one or more computer systems. The learning based model is configured for mapping a triangular relationship between optical images, electron beam images, and design data, and the learning based model applies the triangular relationship to the input to thereby generate simulated images for the specimen.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.