Method and apparatus for generating illuminating radiation
US10048596B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 2, 2017 |
| Grant date | Aug 14, 2018 |
| Priority date | — |
| Expiry date | May 2, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An method for generating illuminating radiation in an illumination apparatus for use in an inspection apparatus for use in lithographic processes is described. A driving radiation beam is provided that comprises a plurality of radiation pulses. The beam is split into first and second pluralities of driving radiation pulses. Each plurality of driving radiation pulses has a controllable characteristic. The first and second pluralities may be used to generate an illuminating radiation beam with an output wavelength spectrum. The first and second controllable characteristics are controlled so as to control first and second portions respectively of the output wavelength spectrum of the illuminating radiation beam.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.