Sander Bas Roobol
22Patents
2h-index
27Co-inventors
46Inventor score
Filing activity: Jul 5, 2016 → Jan 28, 2020
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US10067068B2 | Lithographic apparatus and method for performing a measurement | Physics | 4 | Active |
| US10133192B2 | Method and apparatus for determining the property of a structure, device manufacturing method | Electricity | 3 | Active |
| US10451559B2 | Illumination source for an inspection apparatus, inspection apparatus and inspection method | Physics | 2 | Active |
| US10330606B2 | Illumination source for an inspection apparatus, inspection apparatus and inspection method | Physics | 2 | Active |
| US10379448B2 | Methods and apparatus for predicting performance of a measurement method, measurement method and apparatus | Physics | 1 | Active |
| US10670974B2 | Metrology apparatus for and a method of determining a characteristic of interest of a structure on a substrate | Physics | 1 | Active |
| US10976265B2 | Optical detector | Physics | 1 | Active |
| US10530111B2 | Apparatus for delivering gas and illumination source for generating high harmonic radiation | Physics | 1 | Active |
| US10234771B2 | HHG source, inspection apparatus and method for performing a measurement | Physics | 1 | Active |
| US11092902B2 | Method and apparatus for detecting substrate surface variations | Physics | 1 | Active |
| US10267744B2 | Illumination source for an inspection apparatus, inspection apparatus and inspection method | Physics | 1 | Active |
| US11626704B2 | Methods and apparatus for predicting performance of a measurement method, measurement method and apparatus | Electricity | 1 | Active |
| US10725387B2 | Determining an edge roughness parameter of a periodic structure | Physics | 0 | Active |
| US10248029B2 | Method and apparatus for inspection and metrology | Physics | 0 | Active |
| US12269229B2 | Reflector manufacturing method and associated reflector | Performing Operations; Transporting | 0 | Active |
| US10048596B2 | Method and apparatus for generating illuminating radiation | Physics | 0 | Active |
| US10816906B2 | HHG source, inspection apparatus and method for performing a measurement | Physics | 0 | Active |
| US10578979B2 | Method and apparatus for inspection and metrology | Physics | 0 | Active |
| US11353796B2 | Method and apparatus for determining a radiation beam intensity profile | Physics | 0 | Active |
| US10649344B2 | Illumination source for an inspection apparatus, inspection apparatus and inspection method | Physics | 0 | Active |
| US10983361B2 | Methods of aligning a diffractive optical system and diffracting beams, diffractive optical element and apparatus | Physics | 0 | Active |
| US10630037B2 | Apparatus for delivering gas and illumination source for generating high harmonic radiation | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.