Method for analyzing an object using a combination of long and short coherence interferometry
US10054419B2 · kind B2 · utility
1Cited by
4References
16Claims
0Family size
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Key dates
| Filing date | Apr 29, 2015 |
| Grant date | Aug 21, 2018 |
| Priority date | — |
| Expiry date | May 3, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B9/0209
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method for high dynamic range and high accuracy interferometry measurements is described. The method uses a broadband light source for generating light, an interferometer, a phase shifting device, an imaging optical system and a detector array for collecting and measuring the reflected light from an object. The detected light is processed by a processor unit to obtain the object's surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.