Probe systems, storage media, and methods for wafer-level testing over extended temperature ranges
US10060963B2 · kind B2 · utility
1Cited by
5References
21Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 28, 2017 |
| Grant date | Aug 28, 2018 |
| Priority date | — |
| Expiry date | Mar 28, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2891
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Probe systems, storage media, and methods for wafer-level testing over extended temperature ranges are disclosed herein. The methods are configured to test a plurality of devices under test (DUTs) present on a substrate. The probe systems are programmed to perform the methods. The storage media include computer-readable instructions that direct a probe system to perform the methods.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.