Patent · US Active

Projection lens with wave front manipulator and related method and apparatus

US10061206B2 · kind B2 · utility

0Cited by

12References

18Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Boris Bittner · Roth, DE
Norbert Wabra · Werneck, DE
Sonja Schneider · Lehrberg, DE
Ricarda Schoemer · Zusmarshausen, DE

Key dates

Filing date	Nov 16, 2017
Grant date	Aug 28, 2018
Priority date	—
Expiry date	Nov 16, 2037

Classification

Technology area (CPC G)Physics
CPC primaryG03F7/70308
WIPO fieldOptics
WIPO sectorInstruments

Abstract

A projection lens images a pattern of a mask arranged in the region of an object plane of the projection lens into an image plane of the projection lens via electromagnetic radiation with a work wavelength λ<260 nm. The projection lens has a multiplicity of optical elements with optical surfaces. The projection lens also has a wavefront manipulation system for controllable influencing of the wavefront of the projection radiation travelling from the object plane to the image plane. The wavefront manipulation system has a manipulator having a manipulator element and an actuating device or reversibly changing an optical effect of the manipulator element on radiation of the projection beam path.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.