Mirror device

US10101507B2 · kind B2 · utility

Assignee

• Carl Zeiss SMT GmbH · DE

Inventors

• Yanko Sarov · Aalen, DE
• Markus Holz · Aalen, DE
• Fabian Haacker · Aalen, DE
• Mark Christof Wengler · Heidenheim an der Brenz, DE
• Markus Hauf · Ulm, DE

Key dates

• Filing date: Jun 13, 2017
• Grant date: Oct 16, 2018
• Expiry date: Jun 13, 2037

Classification

• Technology area (CPC G): Physics
• CPC primary: G03F7/70908
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A mirror device includes at least one electrically conductive shielding element, which forms a mechanism for producing an electric field in a region adjacent to at least one side surface and/or a rear side of a mirror body.