Rotational indexer with additional rotational axes
US10109517B1 · kind B1 · utility
23Cited by
23References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 10, 2018 |
| Grant date | Oct 23, 2018 |
| Priority date | — |
| Expiry date | Jan 10, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/68764
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A rotational indexer is provided that may be rotated to move semiconductor wafers or other items between various stations arranged in a circular array; the items being moved may be supported by arms of the indexer during such movement. The rotational indexer may be further configured to also cause the items being moved to rotate about other rotational axes to cause rotation of the items relative to the arms supporting them.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.