Azimuthal mixer
US10113232B2 · kind B2 · utility
2Cited by
21References
21Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 17, 2015 |
| Grant date | Oct 30, 2018 |
| Priority date | — |
| Expiry date | May 6, 2036 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/45512
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
An azimuthal mixer component that may be plumbed in-line with a showerhead stem tube of a semiconductor processing apparatus is provided. The azimuthal mixer may include a main passage that is coaxial with the stem tube, and one or more plenums that partially or wholly encircle the main passage. Corresponding sets of radial passages may fluidically connect the main passage with each of the plenums.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.