Panya Wongsenakhum
20Patents
13h-index
22Co-inventors
81Inventor score
Filing activity: Sep 3, 1998 → May 19, 2020
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6692575B1 | Apparatus for supporting a substrate in a reaction chamber | Emerging Cross-Sectional Technologies | 522 | Expired |
| US7141494B2 | Method for reducing tungsten film roughness and improving step coverage | Emerging Cross-Sectional Technologies | 121 | Expired |
| US7589017B2 | Methods for growing low-resistivity tungsten film | Electricity | 80 | Active |
| US7262125B2 | Method of forming low-resistivity tungsten interconnects | Electricity | 72 | Expired |
| US7655567B1 | Methods for improving uniformity and resistivity of thin tungsten films | Electricity | 71 | Active |
| US6190732A | Method and system for dispensing process gas for fabricating a device on a substrate | Emerging Cross-Sectional Technologies | 59 | Expired |
| US8101521B1 | Methods for improving uniformity and resistivity of thin tungsten films | Electricity | 47 | Active |
| US8048805B2 | Methods for growing low-resistivity tungsten film | Electricity | 44 | Active |
| US7754604B2 | Reducing silicon attack and improving resistivity of tungsten nitride film | Electricity | 42 | Active |
| US6508197B1 | Apparatus for dispensing gas for fabricating substrates | Emerging Cross-Sectional Technologies | 28 | Expired |
| US6274495A | Method for fabricating a device on a substrate | Emerging Cross-Sectional Technologies | 20 | Expired |
| US8262800B1 | Methods and apparatus for cleaning deposition reactors | Electricity | 16 | Active |
| US9082589B2 | Hybrid impedance matching for inductively coupled plasma system | Electricity | 14 | Active |
| US6544341B1 | System for fabricating a device on a substrate with a process gas | Emerging Cross-Sectional Technologies | 13 | Expired |
| US9918376B2 | Hybrid impedance matching for inductively coupled plasma system | Electricity | 9 | Active |
| US10113232B2 | Azimuthal mixer | Chemistry; Metallurgy | 2 | Active |
| US10090174B2 | Apparatus for purging semiconductor process chamber slit valve opening | Electricity | 1 | Active |
| US10872787B2 | Apparatus for purging semiconductor process chamber slit valve opening | Electricity | 0 | Active |
| US10132413B2 | Gas inlet valve with incompatible materials isolation | Mechanical Engineering; Lighting; Heating | 0 | Active |
| US12227842B2 | Vapor accumulator for corrosive gases with purging | Chemistry; Metallurgy | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.